Semiconductor substrate temperature determination

Details Semiconductor substrate temperature determination Semiconductor substrate temperature determination

2007-04-19

2011-11-29

Smith, R. A. (Department: 2841)

Thermal measuring and testing

Temperature measurement

By a vibratory effect

C374S052000, C438S017000

Reexamination Certificate

active

08066430

ABSTRACT:
The invention provides a method and a device for determining the temperature of a semiconductor substrate. A resonance circuit (110) is provided on the semiconductor substrate and is formed by a junction capacitor (11) and an inductor (12). The substrate is placed on a holder and the resonance circuit (110) is irradiated with electromagnetic energy of an electromagnetic field (5) generated by a radiation device (200). A resonance frequency of the resonance circuit (110) is determined by detecting an effect of the resonance circuit (110) on the irradiated electromagnetic field (5), and a temperature of the semiconductor substrate is determined as a function of the resonance frequency. The method and device according to the invention provide for a more accurate determination of the temperature of the semiconductor substrate due to an increased sensitivity to the temperature of the junction capacitor (11).

REFERENCES:
patent: 5821599 (1998-10-01), Rupp
patent: 6773158 (2004-08-01), Koshimizu
patent: 6794310 (2004-09-01), Miller et al.
patent: 6864108 (2005-03-01), Papa Rao et al.
patent: 7462922 (2008-12-01), Mori et al.
patent: 7803644 (2010-09-01), Balch et al.
patent: 7993942 (2011-08-01), Kurita
patent: 2007/0170170 (2007-07-01), Sata et al.
patent: 58145141 (1983-08-01), None
patent: 2010192649 (2010-09-01), None
patent: WO 2007119359 (2007-10-01), None

Affiliated with

Also associated with

Rating

Semiconductor substrate temperature determination does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor substrate temperature determination, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor substrate temperature determination will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4284765