Semiconductor substrate having alignment marks for locating circ

Details Semiconductor substrate having alignment marks for locating circ Semiconductor substrate having alignment marks for locating circ

1997-03-21

1998-09-08

Powell, William

Electricity: electrical systems and devices

Housing or mounting assemblies with diverse electrical...

For electronic systems and devices

216 59, 216 84, 361764, 361767, H05K 114

Patent

active

058054219

ABSTRACT:
An integrated circuit device having alignment marks that are located on the integrated circuit device semiconductor substrate and aligned to the integrated circuit. The alignment marks are used in conjunction with a circuit diagram of the integrated circuit to determine the point on the bottom of the semiconductor substrate residing beneath the portion of the integrated circuit which the practitioner desires to access.

REFERENCES:
patent: 4632724 (1986-12-01), Chesebro et al.
patent: 4650744 (1987-03-01), Amano
patent: 4732646 (1988-03-01), Elsner et al.
patent: 5268065 (1993-12-01), Grupen-Shemansky
patent: 5332470 (1994-07-01), Crotti

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