Semiconductor substrate having a serious effect of gettering hea

Details Semiconductor substrate having a serious effect of gettering hea Semiconductor substrate having a serious effect of gettering hea

1993-11-29

2000-05-02

Jones, Deborah

Stock material or miscellaneous articles

Composite

Of quartz or glass

428428, 428432, 428446, 428620, B32B 1706

Patent

active

060570369

ABSTRACT:
A silicon dioxide layer overlies a monocrystal silicon substrate and has a first upper surface. A first monocrystal silicon layer overlies the first upper surface and has phosphorus atoms diffused. A second monocrystal silicon layer overlies the first monocrystal silicon layer. The first monocrystal silicon layer may have phosphorus or silicon atoms each of which has a positive electric charge instead of the phosphorus atoms diffused. A lattice mismatching layer may overlie the first upper surface instead of the first monocrystal silicon layer. The lattice mismatching layer has parts in each of which misfit dislocation is caused. The first and the second monocrystal silicon layers may overlie the monocrystal silicon substrate and layer, respectively. In this event, a silicon glass layer is interposed between the first and the second monocrystal silicon layers. The second monocrystal silicon layer has phosphorus atoms diffused.

REFERENCES:
patent: 4282543 (1981-08-01), Ihara et al.
patent: 4447497 (1984-05-01), Manasevit
patent: 4576851 (1986-03-01), Iwamatsu
patent: 4731293 (1988-03-01), Ekholm et al.
patent: 4795679 (1989-01-01), Ramesh et al.
patent: 5063113 (1991-11-01), Wada
patent: 5063181 (1991-11-01), Takita et al.
patent: 5094714 (1992-03-01), Nishimura et al.
patent: 5275872 (1994-01-01), Chang

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