Semiconductor substrate handling tray

Details Semiconductor substrate handling tray Semiconductor substrate handling tray

1983-04-18

1984-10-16

Marbert, James B.

Handling: hand and hoist-line implements

Hand bars and hand barrows

Opposing jaws

294172, B65D 2528

Patent

active

044771126

ABSTRACT:
A generally trough-like elongated element is formed of quartz glass, open at the top, in which the side walls (2) which, preferably, have inclined portions (4) merging with the bottom wall (1) of the trough, are formed with through-slits (3), and the bottom wall is formed with slots (5) cut therein, leaving, however, the end portions solid and uncut; the end portions are formed with positioning or alignment notches (6) extending in a direction transverse to the bottom wall which, preferably, is formed with a recess or notch for engagement with a transport apparatus. The side walls preferably have holes extending, in longitudinal alignment, through the solid end portions to permit passage of the tines of a handling fork (8) therethrough. The slits (3) and the slots (5) provide for three-point suspension of disk or plate-like semiconductor substrates for handling and introduction, for example, into a treatment or diffusion furnace or tube.

REFERENCES:
patent: 4195871 (1980-04-01), Chilton et al.

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