Semiconductor substrate for solid-state image sensing device...

Details Semiconductor substrate for solid-state image sensing device... Semiconductor substrate for solid-state image sensing device...

2007-09-07

2011-11-22

Dickey, Thomas L (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

C257S613000, C257SE31003, C438S471000, C438S087000

Reexamination Certificate

active

08063466

ABSTRACT:
There is provided a semiconductor substrate for solid-state image sensing device in which the production cost is lower than that of a gettering method through a carbon ion implantation and problems such as occurrence of particles at a device production step and the like are solved.Silicon substrate contains solid-soluted carbon having a concentration of 1×1016-1×1017atoms/cm3and solid-soluted oxygen having a concentration of 1.4×1018-1.6×1018atoms/cm3.

REFERENCES:
patent: 7700394 (2010-04-01), Sadamitsu et al.
patent: 2003/0170928 (2003-09-01), Shimozono et al.
patent: 2005/0250349 (2005-11-01), Sadamitsu et al.
patent: 2005/0253221 (2005-11-01), Takase et al.
patent: 1465105 (2003-12-01), None
patent: 1501122 (2005-01-01), None
patent: 2007273959 (2007-10-01), None
patent: 200614379 (2006-05-01), None
patent: WO2004008521 (2004-01-01), None
patent: WO 2005/038899 (2005-04-01), None
patent: 2006/025409 (2006-03-01), None
patent: WO 2006/025409 (2006-03-01), None
Japanese Office Action dated Jun. 15, 2010, Issued in Corresponding Japanese Patent Application 2007-551507.
Taiwanese Office Action corresponding to Application No. 96133524, dated May 6, 2011.

Affiliated with

Also associated with

Rating

Semiconductor substrate for solid-state image sensing device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor substrate for solid-state image sensing device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor substrate for solid-state image sensing device... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4311684