Semiconductor substrate and test pattern for the same

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C324S713000, C324S763010, C324S765010, C257S048000

Reexamination Certificate

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07078920

ABSTRACT:
A test pattern used for testing an electrical characteristic of a semiconductor substrate, includes: a first conductive pattern formed on a lower surface of the semiconductor substrate; a second conductive pattern formed on an upper surface of the semiconductor substrate; first and second electrodes formed on the second conductive pattern, the electrodes being connected to test probes; and a first test via-hole formed through the semiconductor substrate to connect the first and second conductive pattern electrically to each other.

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patent: 04-007851 (1992-01-01), None
patent: 06-123759 (1994-05-01), None

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