Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Rendering selected devices operable or inoperable
Reexamination Certificate
2005-02-04
2008-09-16
Picardat, Kevin M (Department: 2822)
Semiconductor device manufacturing: process
Making device array and selectively interconnecting
Rendering selected devices operable or inoperable
C438S013000, C219S121680
Reexamination Certificate
active
07425471
ABSTRACT:
Methods and systems selectively irradiate structures on or within a semiconductor substrate using a plurality of laser beams. The structures are arranged in a row extending in a generally lengthwise direction. The method generates a first laser beam that propagates along a first laser beam axis that intersects the semiconductor substrate and a second laser beam that propagates along a second laser beam axis that intersects the semiconductor substrate. The method directs the first and second laser beams onto distinct first and second structures in the row. The second spot is offset from the first spot by some amount in a direction perpendicular to the lengthwise direction of the row. The method moves the first and second laser beam axes relative to the semiconductor substrate along the row substantially in unison in a direction substantially parallel to the lengthwise direction of the row.
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Baird Brian W.
Bruland Kelly J.
Evans Frank G.
Lo Ho Wai
Swaringen Stephen N.
Electro Scientific Industries Inc.
Picardat Kevin M
Stoel Rives LLP
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