Electrical resistors – Strain gauge type – With temperature compensation
Patent
1982-11-05
1984-07-24
Envall, Jr., Roy N.
Electrical resistors
Strain gauge type
With temperature compensation
338 9, 338 42, 73708, 73721, 73DIG4, 73720, 73766, G01L 122, G01B 720
Patent
active
044620187
ABSTRACT:
A transducer operating on the strain gauge principle having integral temperature compensation and calibration resistors is disclosed. In the presently preferred embodiment, a silicon dioxide layer is disposed on a silicon substrate. Platinum alloy strain gauge resistors are disposed on the silicon dioxide layer and form a Wheatstone bridge circuit configuration. Laser trimable chromium nitride, platinum alloy and gold temperature compensation and calibration resistors are formed on the silicon dioxide layer from the same films used to form the strain gauge, adhesion layers, conductors and bonding pads, to permit the transducer to be calibrated such that its electrical characteristics are in conformance to specified tolerances when the transducer is subjected to temperature variations.
REFERENCES:
patent: 3341794 (1967-09-01), Stedman
patent: 4079349 (1978-03-01), Dorfeld
patent: 4217570 (1980-08-01), Holmes
patent: 4287772 (1981-09-01), Mounteer et al.
patent: 4299130 (1981-11-01), Konveal
patent: 4325048 (1982-04-01), Zaghi et al.
Mounteer Carlyle A.
Yang Maurice
Blatt J. J.
Envall Jr. Roy N.
Gulton Industries Inc.
Sears Christopher N.
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