Semiconductor strain gauge with elastic load plate

Details Semiconductor strain gauge with elastic load plate Semiconductor strain gauge with elastic load plate

1980-03-11

1981-09-29

Albritton, C. L.

Electrical resistors

Strain gauge type

Dynamometer type

338 2, 357 26, G01L 122

Patent

active

042926181

ABSTRACT:
A semiconductor substrate has a major surface, another major surface on the opposite side of the first major surface, a strain gauge stripe formed in the central portion of the second major surface by diffusing an impurity therein, and electrodes connected to the strain gauge stripes. These strain gauge stripes are spaced from the peripheral edge of the second major surface by a distance greater than 1/3 of the length of the same major surface. The first major surface of the semiconductor substrate is bonded to an elastic metal load plate.

REFERENCES:
patent: 3184962 (1965-05-01), Gay
patent: 3378648 (1968-04-01), Fenner
patent: 3662234 (1972-05-01), Ishii
patent: 4200856 (1980-04-01), Gilcher

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