Semiconductor strain gauge acceleration sensor

Details Semiconductor strain gauge acceleration sensor Semiconductor strain gauge acceleration sensor

1995-07-11

1996-12-24

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73522, G01P 1512

Patent

active

055875319

ABSTRACT:
An acceleration sensor includes an acceleration detecting element (15) for detecting an acceleration in a sealed case (11), silicon oil (16) with which the case (11) is filled for giving damping to the acceleration detecting element (15), and a deformable sealed enclosure (20) which is mounted in the case (11) and is filled with gas. A change in volume of the silicon oil (16) caused by a change in temperature of the silicon oil (16) is counteracted by the deformation of the sealed enclosure (20). The deformation of the sealed enclosure may include variations in the height and pitch of wave shapes defined by a diaphragm portion of the sealed enclosure.

REFERENCES:
patent: 3065639 (1962-11-01), Stedman
patent: 4967597 (1990-11-01), Yamada et al.

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