Semiconductor slice holder

Details Semiconductor slice holder Semiconductor slice holder

1989-10-24

1991-06-11

Bucci, David A.

Handling: hand and hoist-line implements

Hook, hoistline, or grab type

Locking device

2941031, 414416, 901 39, B25J 900, B25J 1502

Patent

active

050226959

ABSTRACT:
A slice handling apparatus (10) is mounted on a robot arm (12) to provide automated processing of semiconductor slices (69). The slice handling apparatus (10) has three tines, a center tine (50) and two side tines (62). The side tines (62) are fixed to position, while the center tine (50) is moved in and out using a control field actuator (20). A Hall effect sensor (26) on the control field actuator (20) provides an electrical feedback to provide a firm gripping force with reduce damage to slice edges by sensitive control of the gripping force. The tines (50, 62) have locator pins (58) which hold the slice (69). The locator pins (58) have a tapered bottom portion (84) and a vertical holding portion (86). The tapered bottom portion (84) prevents the slice (69) from contacting the tines (50, 62) in the event that the slice handling apparatus (10) is not positioned at the exact vertical position desired.

REFERENCES:
patent: 4586743 (1986-05-01), Edwards et al.
patent: 4634107 (1987-01-01), Vandersyde et al.
patent: 4639028 (1987-01-01), Olson

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