Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1984-08-30
1987-01-13
Valenza, Joseph E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414403, 414414, B65G 6500
Patent
active
046361286
ABSTRACT:
A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.
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Bimer Thomas C.
Lewis Alton D.
Millis Edwin G.
Bachand Richard A.
Bucci David A.
Merrett N. Rhys
Sharp Melvin
Texas Instruments Incorporated
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