Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1993-12-17
1995-07-11
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
G01P 1508
Patent
active
054310504
ABSTRACT:
An semiconductor acceleration sensor has an inner weight member supported by a supporting member through a pair of first torsion bars for converting a component force into displacement thereof and an outer weight member supported by the inner weight member through a pair of second torsion bars for converting another component force into displacement thereof, and the displacements are respectively converted into variations of capacitances of two pairs of capacitors, wherein one of the two pairs of capacitors is disposed at first areas where loops of a bidirectional rotation of the inner weight member and nodes of a bidirectional rotation of the outer weight member take place, and the other of the two pairs of capacitors is positioned at second areas where loops of the bidirectional rotation of the outer weight member and nodes of the bidirectional rotation of the inner weight member take place, thereby preventing the two pairs of capacitors from interference.
REFERENCES:
patent: 4598585 (1986-07-01), Boxenhorn
patent: 5016072 (1991-05-01), Greiff
patent: 5081867 (1992-01-01), Yamada
patent: 5195371 (1993-03-01), Greiff
Kwok Helen C.
NEC Corporation
Williams Hezron E.
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