Semiconductor sensor self-checking circuit

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...

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G01L 120

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active

054995264

ABSTRACT:
A self-checking circuit for use with a semi conductor sensor including a semi conductor substrate having a cantilever and piezo resistors formed in said cantilever. The piezo resistors are connected in a bridge circuit having first and second output terminals. A differential amplifier is connected to the first and second output terminals for producing an output signal corresponding to a stress produced in the cantilever. The self-checking circuit comprises a first resistor having a first resistance and a second resistor having a second resistance to provide a small difference between the first and second resistances. A first switching device is provided for connecting the first output terminal to ground through the first resistor in response to a checking signal. A second switching device is provided for connecting the second output terminal to ground through the second resistor in response to a checking signal. The checking signal is applied to the first switching device and at the same time to the second switching device.

REFERENCES:
patent: 4155263 (1979-05-01), Frantz
patent: 4572309 (1986-02-01), Nishiyama
Mutoh et al. "Toyota Air Bag Sensor", Toyota Motor Corporation, Japan, (pp. 89-96).

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