Semiconductor sensor including laminated supporting pedestal

Details Semiconductor sensor including laminated supporting pedestal Semiconductor sensor including laminated supporting pedestal

1996-10-10

1998-07-21

Oda, Christine K.

Measuring and testing

Fluid pressure gauge

Diaphragm

7351436, G01L 906

Patent

active

057837503

ABSTRACT:
A semiconductor sensor includes a circuit board; a pedestal including stacked board-composing materials arranged sequentially on the circuit board and describing a mesh shape on the circuit board, the mesh shape including at least one central opening in which the circuit board is exposed; and a sensing element fixed to and supported on the pedestal as a cantilever.

REFERENCES:
patent: 4314225 (1982-02-01), Tominaga
patent: 5012386 (1991-04-01), McShane
patent: 5150616 (1992-09-01), Kondo et al.
patent: 5415044 (1995-05-01), Yamamoto
patent: 5460044 (1995-10-01), Yamamoto
patent: 5606128 (1997-02-01), Araki

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