Semiconductor sensor for accelerometer

Details Semiconductor sensor for accelerometer Semiconductor sensor for accelerometer

1992-12-23

1994-05-24

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73514, G01P 1508

Patent

active

053138368

ABSTRACT:
A semiconductor sensor for an accelerometer including a beam portion, consisting of a thin beam portion and a thick beam portion and supported by a solid member through the end of the thin beam portion, and a stopper portion provided at a position on an imaginary line along which a center of gravity of the thick beam portion moves. These components are integrally formed in a silicon substrate. Excessive displacement of the beam portion when excessive acceleration is applied is effectively suppressed by the stopper portion, and breakage of the thin beam portion due to excessive acceleration can be avoided.

REFERENCES:
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4955234 (1990-09-01), Marek
Proceedings of the Second International Forum on ASIC and Transducer Technology (ASICT '89) Apr. 9-12, 1989, Mallon et al., "Silicon Sensors and Microstructures: Technology of Today," pp. 87-92.

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