Semiconductor sensor device for measuring intake flow rate

Details Semiconductor sensor device for measuring intake flow rate Semiconductor sensor device for measuring intake flow rate

1992-11-24

1995-03-14

Chilcot, Jr., Richard E.

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

053967950

ABSTRACT:
The semiconductor flow rate detector comprises a semiconductor chip having sensor elements on its surface, leads connected to connecting terminals of the semiconductor chip, and a resin base covering junctions between the leads and the connecting terminals of the semiconductor chip and integrally holding them.

REFERENCES:
patent: 4517837 (1985-05-01), Oyama et al.
patent: 4705713 (1987-11-01), Ohta et al.
patent: 4884443 (1989-12-01), Lee et al.
patent: 4888988 (1989-12-01), Lee et al.
patent: 4986122 (1991-01-01), Gust
patent: 5231878 (1993-08-01), Zanini-Fisher et al.

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