Semiconductor sensor and transmitter for use in tire...

Details Semiconductor sensor and transmitter for use in tire... Semiconductor sensor and transmitter for use in tire...

2006-01-10

2006-01-10

Noori, Max (Department: 2855)

Measuring and testing

Tire, tread or roadway

C073S715000, C073S753000

Reexamination Certificate

active

06983650

ABSTRACT:
A compact and light semiconductor sensor for detecting pressure and acceleration. A pressure sensor is formed on a first surface of an intermediate plate. An acceleration sensor is formed on a second surface of the intermediate plate. A first plate having a diaphragm is bonded to the intermediate plate to define a hermetic chamber of the pressure sensor. A second plate is bonded to the second surface of the intermediate plate. A spring support supports the mass in a manner relatively movable with respect to the second plate.

REFERENCES:
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patent: 5320705 (1994-06-01), Fujii et al.
patent: 5531092 (1996-07-01), Okada
patent: 6633229 (2003-10-01), Normann et al.
patent: 0 333 091 (1989-09-01), None
patent: 8-160072 (1996-06-01), None
patent: 9-18017 (1997-01-01), None
patent: 10132572 (1998-05-01), None

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