Semiconductor sensor

Details Semiconductor sensor Semiconductor sensor

2008-05-20

2008-05-20

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Mounting and connection

C073S754000

Reexamination Certificate

active

11300445

ABSTRACT:
A semiconductor sensor for improving manufacturing productivity. Opposing electrodes, or a diaphragm electrode and a fixed electrode, form an electrostatic capacity sensing semiconductor microphone on a microphone chip. A through electrode is formed on the microphone chip by a conductor extending between the upper and lower surfaces of the semiconductor substrate. The through electrode directly and electrically connects a MEMS configuration formed by the diaphragm electrode to the wiring of a printed wiring board without using wire bonding.

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patent: WO 02/45463 (2002-06-01), None

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