Semiconductor sensing device using different resistance types

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Using a particular bridge circuit

Reexamination Certificate

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C324S721000, C073S708000

Reexamination Certificate

active

07015706

ABSTRACT:
A semiconductor sensing device has a semiconductor substrate with a pressure sensing bridge circuit including piezo-resistance elements formed on the substrate. Further, the semiconductor sensing device has a temperature sensing bridge circuit including resistance elements formed on the semiconductor substrate. A pair of the resistance elements is connected with a power supply terminal, and the other pair of the resistance elements is connected with a grounding terminal. The resistance elements in either or both of these pairs are formed of different resistance types from each other and of the same conductivity type.

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patent: A-11-153503 (1999-06-01), None

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