Semiconductor rod zone melting apparatus

Details Semiconductor rod zone melting apparatus Semiconductor rod zone melting apparatus

1988-04-20

1991-04-23

Straub, Gary P.

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

1566207, 75 1011, C30B 3500, C30B 1330

Patent

active

050098608

ABSTRACT:
According to this invention, a semiconductor rod zone melting apparatus for manufacturing single-crystal semiconductor such as silicon, germanium, and the like and compound semiconductors such as gallium phosphate, and the like by the FZ process is disclosed. In this invention, a substantially U-shaped metal piece is arranged near one of upper and lower side surfaces of an induction heating coil surrounding a floating zone of a semiconductor rod to be melted, the floating zone surrounding space can be varied upon relative movement between the coil and the metal piece toward the radial direction of the coil. The floating zone of the semiconductor rod can be homogeneously and concentratively heated, and zone melting of a large-diameter semiconductor rod is facilitated.

REFERENCES:
patent: 3342970 (1967-09-01), Emeis
patent: 3607138 (1971-09-01), Keller
patent: 3622280 (1971-11-01), Keller
patent: 3685973 (1972-08-01), Keller et al.
patent: 3827017 (1974-07-01), Keller
patent: 4045278 (1977-08-01), Keller

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