Semiconductor registration measurement mark

Details Semiconductor registration measurement mark Semiconductor registration measurement mark

1999-01-15

2000-11-28

Hardy, David

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257620, 438401, 438462, 438975, H01L 23544, H01L 2176, H01L 2146, H01L 2178, H01L 21301

Patent

active

061539414

ABSTRACT:
On a semiconductor substrate, a registration measurement mark and intended patterns monitored by the registration measurement mark are provided. Step or level difference between the surface of registration measurement mark and the surface of intended patterns is made to be within .+-.0.2 .mu.m. By such structure, it becomes possible to accurately monitor the intended patterns by utilizing the registration measurement mark.

REFERENCES:
patent: 5949547 (1999-09-01), Tseng et al.
patent: 5969428 (1999-10-01), Nomura et al.

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