Semiconductor purification by solid state electromigration

Details Semiconductor purification by solid state electromigration Semiconductor purification by solid state electromigration

1984-07-31

1987-06-23

Andrews, R. L.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

204130, 2041801, 134 1, C25F 100

Patent

active

046750878

ABSTRACT:
The removal of residual impurities from semiconductor material is accomplished by solid state electromigration of the impurities from the semiconductor slice into a surrounding conductive liquid (e.g. Hg) which is maintained at a negative potential.

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