Semiconductor production system

Details Semiconductor production system Semiconductor production system

1995-11-22

1997-12-02

Trammell, James P.

Boots, shoes, and leggings

364149, 364518, G06F 1900

Patent

active

056943253

ABSTRACT:
A system for automatically producing semiconductor products has a section for preparing a process flow containing a series of processes and process conditions for producing different semiconductor products in different quantities in a production line; a section for simulating the producing of semiconductor products according to the process flow; a section for feeding a result of the simulation back to the process flow preparation section, which optimizes the process flow according to the simulation result; and a section for producing semiconductor products according to the optimized process flow.

REFERENCES:
patent: 4646238 (1987-02-01), Carlson, Jr. et al.
patent: 4796194 (1989-01-01), Atherton
patent: 4807108 (1989-02-01), Bon-Arieh et al.
patent: 4901242 (1990-02-01), Kotan
patent: 5319564 (1994-06-01), Smayling et al.
patent: 5495417 (1996-02-01), Fuduka et al.

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