Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent
1997-10-01
2000-08-29
Grant, William
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
700105, G06F 1900
Patent
active
061121304
ABSTRACT:
A process flow, in which wafer processing conditions are described for forming a semiconductor through a plurality of processes, is formed for each lot in one type. A wafer processing is formed for each lot in one type of semiconductor in accordance with the process flow. When a different processing condition should be described according to a wafer in the lot in a certain process of the process flow, the process flow forming includes forming a plurality of different flows in that process by defining division/combination locations from a parent flow. When a faulty processing occurs in the wafer processing in a certain process, the process flow associated with that process is reformed, and a reprocessing is performed in accordance with the reformed process flow.
REFERENCES:
patent: 5105362 (1992-04-01), Kotani
patent: 5164905 (1992-11-01), Iwasaki et al.
patent: 5375062 (1994-12-01), Aoki
patent: 5432702 (1995-07-01), Barnett
patent: 5448488 (1995-09-01), Oshima
patent: 5495417 (1996-02-01), Fuduka et al.
patent: 5570293 (1996-10-01), Tanaka et al.
patent: 5591299 (1997-01-01), Seaton et al.
Fukuda Etsuo
Okutani Hidehiro
Garland Steven R.
Grant William
Kabushiki Kaisha Toshiba
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