Semiconductor processors, sensors, semiconductor processing...

Details Semiconductor processors, sensors, semiconductor processing... Semiconductor processors, sensors, semiconductor processing...

2007-02-20

2007-02-20

Ackun, Jr., Jacob K. (Department: 3723)

Optics: measuring and testing

For size of particles

C356S339000, C356S340000

Reexamination Certificate

active

09521092

ABSTRACT:
Semiconductor processors, sensors, semiconductor processing systems, semiconductor workpiece processing methods, and turbidity monitoring methods are provided. According to one aspect, a semiconductor processor includes a process chamber configured to receive a semiconductor workpiece for processing; a supply connection in fluid communication with the process chamber and configured to supply slurry to the process chamber; and a sensor configured to monitor the turbidity of the slurry. Another aspect provides a semiconductor workpiece processing method including providing a semiconductor process chamber; supplying slurry to the semiconductor process chamber; and monitoring the turbidity of the slurry using a sensor.

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