Semiconductor processor opening and closure construction

Details Semiconductor processor opening and closure construction Semiconductor processor opening and closure construction

1993-06-30

1995-09-12

Nelli, Raymond A.

Heating

Heating or heat retaining work chamber structure

Door, cover or port

432247, 432253, 110173R, F23M 700

Patent

active

054492890

ABSTRACT:
A semiconductor processor including an enclosure with an access opening. A door assembly is supported for translational movement between aligned and displaced positions relative to the access opening. The door assembly has a main part, and an extension part which telescopically moves toward and away from the access opening. A bellows is provided between the main and extension parts. The closed door is sealed by a first face seal and a second expandable seal. A liquids trap is provided to prevent outward escape of liquids from the access opening. A drain removes liquid collected in the trap.

REFERENCES:
patent: 4403448 (1983-09-01), Lesher
patent: 4427378 (1984-01-01), Bowers
patent: 4883002 (1989-11-01), Schuster
patent: 5193998 (1993-03-01), Hack et al.
patent: 5302120 (1994-04-01), Durado

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