Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent
1995-06-07
1996-12-17
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
134157, 134153, 134172, 134181, B08B 304
Patent
active
055843107
ABSTRACT:
A semiconductor processor and methods using pillar shaped liquid emitters. The emitters have emission ports upon which liquid domes of processing chemicals are formed. The domes are applied to the surface of a wafer to wash discrete areas and thereby allow gases evolved from the reaction to easily escape about the domes and through gas passageways existing about the pillars. The wafer is rotated to provide even processing of the treated surface.
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Bergman Eric J.
Oberlitner Thomas H.
Semitool Inc.
Stinson Frankie L.
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