Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate
2007-02-20
2007-02-20
Hoang, Tu (Department: 2832)
Electric heating
Heating devices
With power supply and voltage or current regulation or...
C219S509000, C165S206000
Reexamination Certificate
active
10983248
ABSTRACT:
A temperature control system having a re-circulation loop that uses valves to selectively circulate a temperature control fluid through a cooling system, through a heating system, or through a through passage so as to controlling the temperature of the temperature control fluid, which, in turn, controls the temperature of a target. A temperature sensor monitors the target's temperature. A controller controls valve operation in response to the temperature measured by the temperature sensor to obtain a predetermined target temperature. Beneficially, the controller controls the target's temperature according to a predetermined temperature profile. Continuous etching along a predetermined temperature profile is possible.
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Hoang Tu
McKenna Long & Aldridge LLP
Oriol Inc.
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