Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Patent
1995-04-03
1997-10-21
Bennett, Henry A.
Drying and gas or vapor contact with solids
Apparatus
With apparatus using centrifugal force
34312, 414938, F26B 1724
Patent
active
056783205
ABSTRACT:
A processor for processing semiconductor articles, such as integrated circuit wafers, flat panel displays, semiconductor substrates, and data disks. The processor has an interface section which receives articles in article carriers. The interface section transfers the articles from carriers into processing arrays. A conveyor having an automated arm assembly moves article arrays to and between processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
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Berner Robert W.
Culliton Stephen P.
Curtis Gary L.
Thompson Raymon F.
Wright Blaine G.
Bennett Henry A.
Doster Dinmatia
Semitool Inc.
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