Semiconductor processing systems

Details Semiconductor processing systems Semiconductor processing systems

1997-06-24

1999-03-16

Bennett, Henry

Material or article handling

Device for emptying portable receptacle

Nongravity type

414941, B65B 2102

Patent

active

058821686

ABSTRACT:
A processor for processing semiconductor articles, such as integrated circuit wafers, flat panel displays, semiconductor substrates, and data disks. The processor has an interface section which receives articles in article carriers. The interface section transfers the articles from carriers into processing arrays. A conveyor having an automated arm assembly moves article arrays to and between processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

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