Semiconductor processing system with wafer container docking...

Details Semiconductor processing system with wafer container docking... Semiconductor processing system with wafer container docking...

2005-11-01

2005-11-01

Fiorilla, Chris (Department: 1734)

Coating apparatus

With means to centrifuge work

C118S612000, C118S319000, C118S320000, C118S326000, C118S500000, C118S066000, C414S938000, C414S940000

Reexamination Certificate

active

06960257

ABSTRACT:
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

REFERENCES:
patent: 3977926 (1976-08-01), Johnson et al.
patent: 4431361 (1984-02-01), Bayne
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4515104 (1985-05-01), Lee
patent: 4568234 (1986-02-01), Lee et al.
patent: 4705444 (1987-11-01), Tullis et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4744715 (1988-05-01), Kawabata
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4777732 (1988-10-01), Hirano
patent: 4802809 (1989-02-01), Bonora et al.
patent: 4827954 (1989-05-01), Layton
patent: 4840530 (1989-06-01), Nguyen
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 4924890 (1990-05-01), Giles et al.
patent: 4927438 (1990-05-01), Mears et al.
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5055036 (1991-10-01), Asano et al.
patent: 5064337 (1991-11-01), Asakawa et al.
patent: 5107880 (1992-04-01), Pierson
patent: 5110248 (1992-05-01), Asano
patent: 5125784 (1992-06-01), Asano
patent: 5145303 (1992-09-01), Clarke
patent: 5154199 (1992-10-01), Thompson et al.
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5177514 (1993-01-01), Ushijima et al.
patent: 5178639 (1993-01-01), Nishi
patent: 5180273 (1993-01-01), Sakaya et al.
patent: 5181819 (1993-01-01), Sakata et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5215420 (1993-06-01), Hughes et al.
patent: 5232328 (1993-08-01), Owczarz et al.
patent: 5250114 (1993-10-01), Konishi et al.
patent: 5301700 (1994-04-01), Kamikawa et al.
patent: 5339539 (1994-08-01), Shiraishi et al.
patent: 5363867 (1994-11-01), Kawano et al.
patent: 5364219 (1994-11-01), Takahashi et al.
patent: 5374153 (1994-12-01), Nishi
patent: 5378145 (1995-01-01), Ono et al.
patent: 5383482 (1995-01-01), Yamada et al.
patent: 5388945 (1995-02-01), Garric et al.
patent: 5395474 (1995-03-01), Suzuki et al.
patent: 5402807 (1995-04-01), Moore et al.
patent: 5429251 (1995-07-01), Matthews
patent: 5431179 (1995-07-01), Miyazaki et al.
patent: 5451131 (1995-09-01), Hecht et al.
patent: 5462397 (1995-10-01), Iwabuchi
patent: 5464313 (1995-11-01), Ohsawa
patent: 5468112 (1995-11-01), Ishii et al.
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5503171 (1996-04-01), Yokomizo et al.
patent: 5518552 (1996-05-01), Tanoue et al.
patent: 5520205 (1996-05-01), Guldi et al.
patent: 5544421 (1996-08-01), Thompson et al.
patent: 5562383 (1996-10-01), Iwai
patent: 5570994 (1996-11-01), Somekh et al.
patent: 5575611 (1996-11-01), Thompson et al.
patent: 5578127 (1996-11-01), Kimura
patent: 5586585 (1996-12-01), Bonora
patent: 5613821 (1997-03-01), Muka et al.
patent: 5658123 (1997-08-01), Goff et al.
patent: 5664927 (1997-09-01), Takeuchi
patent: 5674039 (1997-10-01), Walker et al.
patent: 5697749 (1997-12-01), Iwabuchi et al.
patent: 5730573 (1998-03-01), Masujima et al.
patent: 5766824 (1998-06-01), Batchelder et al.
patent: 5772386 (1998-06-01), Mages et al.
patent: 5788448 (1998-08-01), Wakamori et al.
patent: 5887604 (1999-03-01), Murakami et al.
patent: 5944475 (1999-08-01), Bonora et al.
patent: 6652219 (2003-11-01), Davis et al.
patent: 6712577 (2004-03-01), Davis et al.
patent: 6723174 (2004-04-01), Nelson et al.
patent: 6799932 (2004-10-01), Davis et al.
patent: 6833035 (2004-12-01), Thompson et al.
patent: 2003/0202871 (2003-10-01), Thompson et al.
patent: 43 26 309 (1993-08-01), None
patent: 0 047 132 (1982-03-01), None
patent: 0 452 939 (1991-10-01), None
patent: 560439 (1993-09-01), None
patent: 1-048442 (1989-02-01), None
patent: 1-253232 (1989-10-01), None
patent: 4-144150 (1992-05-01), None
patent: 5-062955 (1993-03-01), None
patent: 5-146984 (1993-06-01), None
patent: 5-211224 (1993-08-01), None
patent: 6-177109 (1994-06-01), None
patent: WO 81/02533 (1981-09-01), None

Affiliated with

Also associated with

Rating

Semiconductor processing system with wafer container docking... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor processing system with wafer container docking..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor processing system with wafer container docking... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3467611