Semiconductor processing system

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C156S345240, C156S345310, C156S345320, C118S719000, C204S298250

Reexamination Certificate

active

07090741

ABSTRACT:
A semiconductor processing system includes a common transfer chamber (34) having first and second compartments (46, 48) partitioned by a partition wall (44). First and second vacuum processing apparatuses (32E,32A) are respectively connected to the first and second compartments (46, 48). A pressure control section (PCS) controls the pressures inside the first and second compartments (46, 48). The pressure control section (PCS) includes first and second vacuum pumps (68, 70) respectively connected to the first and second compartments (46, 48), and a line (76) connecting the delivery side of the second vacuum pump (70) to the suction side of the first vacuum pump (68). The pressure control section (PCS) performs a setting such that a second ultimate pressure or lowest operational pressure of the second compartment (48) is lower than a first ultimate pressure or lowest operational pressure of the first compartment (46).

REFERENCES:
patent: 4851101 (1989-07-01), Hutchinson
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5286296 (1994-02-01), Sato et al.
patent: 5310410 (1994-05-01), Begin et al.
patent: 5882413 (1999-03-01), Beaulieu et al.
patent: 6440261 (2002-08-01), Tepman et al.
patent: 2002/0134506 (2002-09-01), Franklin et al.
patent: 8-288294 (1996-11-01), None
patent: 8-340036 (1996-12-01), None
patent: 10-270527 (1998-09-01), None
patent: 10-270527 (1998-10-01), None
patent: 11-230036 (1999-08-01), None
patent: 2000-208589 (2000-07-01), None
patent: 2000-299367 (2000-10-01), None
patent: 2002-261148 (2002-09-01), None
Machine Translation of 10-270527 and 11-230036.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor processing system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor processing system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor processing system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3690810

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.