Semiconductor processing-purpose substrate detecting method...

Details Semiconductor processing-purpose substrate detecting method... Semiconductor processing-purpose substrate detecting method...

2006-09-12

2006-09-12

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C414S938000, C250S559290

Reexamination Certificate

active

07105847

ABSTRACT:
A detecting device includes a sensor support body having a pair of arms, and an optical sensor having a combination of a light emitting unit and a light receiving unit disposed on one and the other of the arms, respectively. A control operation section controls a driving section and, with the arms inserted in a cassette, the sensor support body is moved, thereby performing a scanning operation for scanning the substrate by the optical sensor. The scanning operation is set such that a light beam is related to the substrate while vertically moving at a plurality of scanning positions. The control operation section finds out the presence of absence of the substrate and the position of the front end of the substrate within the cassette on the basis of data obtained from the optical sensor during scanning.

REFERENCES:
patent: 5319216 (1994-06-01), Mokuo et al.
patent: 5565034 (1996-10-01), Nanbu et al.
patent: 5725664 (1998-03-01), Nanbu et al.
patent: 5952670 (1999-09-01), Harvey
patent: 6054181 (2000-04-01), Nanbu et al.
patent: 6147356 (2000-11-01), Hahn et al.
patent: 6303939 (2001-10-01), Chung et al.
patent: 2002/0125448 (2002-09-01), An
patent: 2003/0107011 (2003-06-01), Meyhofer et al.
patent: 7-130727 (1995-05-01), None
patent: 10-313039 (1998-11-01), None
patent: 2000-36528 (2000-02-01), None

Affiliated with

Also associated with

Rating

Semiconductor processing-purpose substrate detecting method... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor processing-purpose substrate detecting method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor processing-purpose substrate detecting method... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3534637