Semiconductor processing furnace tube and alignment jig

Details Semiconductor processing furnace tube and alignment jig Semiconductor processing furnace tube and alignment jig

1990-04-24

1991-06-11

Bennett, Henry A.

Heating

Work chamber having heating means

Work chamber having gaseous material supply or removal...

432152, F27B 516, F27B 904

Patent

active

050228536

ABSTRACT:
Disclosed is a quartz tube for a furnace for processing semiconductor wafers. The furnace comprises:

REFERENCES:
patent: 4680008 (1987-07-01), Rioux
patent: 4767251 (1988-08-01), Whang

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