Semiconductor-processing apparatus provided with susceptor...

Details Semiconductor-processing apparatus provided with susceptor... Semiconductor-processing apparatus provided with susceptor...

2007-10-02

2007-10-02

Moore, Karla (Department: 1763)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C118S728000, C118S730000, C118S733000, C156S345310, C156S345510, C156S345540

Reexamination Certificate

active

10897061

ABSTRACT:
A semiconductor-processing apparatus comprises a susceptor and removable placing blocks detachably placed at a periphery of the susceptor for transferring a substrate. Retractable supporting members are provided for detaching/attaching the placing blocks from/to the susceptor.

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patent: 2003/0021657 (2003-01-01), Yamagishi
patent: 2006/0075972 (2006-04-01), Nakashima et al.
patent: 06-318630 (1994-11-01), None
U.S. Appl. No. filed May 7, 2004, Baiei Kawano.

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