Semiconductor processing apparatus having lift and tilt mechanis

Details Semiconductor processing apparatus having lift and tilt mechanis Semiconductor processing apparatus having lift and tilt mechanis

1997-12-15

2000-07-18

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

2505593, G01B 1114, G01N 2100

Patent

active

06091498&

ABSTRACT:
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide/actuator comprising a fixed frame and a movable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the movable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.

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