Optics: measuring and testing – Position or displacement
Reexamination Certificate
2006-02-21
2006-02-21
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Position or displacement
Reexamination Certificate
active
07002698
ABSTRACT:
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear way comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
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Dix Mark
Hanson Kyle
Woodruff Daniel J.
Zila Vlad
Perkins Coie LLP
Semitool Inc.
Stafira Michael P.
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