Semiconductor process system, its control method, computer reada

Details Semiconductor process system, its control method, computer reada Semiconductor process system, its control method, computer reada

1998-06-10

2000-11-14

Grant, William

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700106, G06F 1900

Patent

active

061482463

ABSTRACT:
In a semiconductor process system having a semiconductor process apparatus for performing various jobs to manufacture a semiconductor device, a material convey unit for conveying materials used in the jobs to the semiconductor process apparatus, and a host computer for monitoring the operation state of the semiconductor process apparatus, instructing the material convey unit to convey a material used in a required job, and instructing the semiconductor process apparatus to execute the job, the host computer makes a job reservation that informs the semiconductor process apparatus of the job to be executed simultaneously with the convey instruction of the material used in the required job, and the semiconductor process apparatus confirms in accordance with the job reservation if job data required for the reserved job is present in the apparatus, and takes a predetermined measure such as requesting a job data transfer means to transfer job data required, or outputting a predetermined warning, if the job data is not present.

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patent: 5867388 (1999-02-01), Okumura et al.
patent: 6000830 (1999-12-01), Asano et al.

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