Semiconductor probe and alignment system

Details Semiconductor probe and alignment system Semiconductor probe and alignment system

1991-06-28

1993-08-24

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 102

Patent

active

052392600

ABSTRACT:
A semiconductor probe and alignment system are disclosed. The semiconductor probe includes a silicon-based substrate and membrane on which a plurality of pyramid shaped contactors are formed. Each of the contactors includes a metalized tip for contacting bonding pads on a semiconductor die. The area of the probe surrounding each contactor is thinned to form a membrane to provide flexibility and thus compliance to assure contact between each contactor and its respective bonding pad. In the alignment system, a guide wall formed from a photo-imageable material is created around at least a portion of each bonding pad to provide alignment for guiding the contactors on the probe onto the bonding pads.

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