Semiconductor pressure transducer

Details Semiconductor pressure transducer Semiconductor pressure transducer

1981-10-26

1984-03-27

Albritton, C. L.

Electrical resistors

Strain gauge type

73721, 73727, 338 4, G01L 122

Patent

active

044397526

ABSTRACT:
A transducer for sensing pressure, wherein the transducer is formed of a single crystal semiconductor square chip having piezoresistive stress sensors disposed on one surface thereof and a cavity formed in the opposite surface, and wherein one of the edges of the chip is oriented at an angle of substantially 22.5.degree. with respect to a <110> crystal direction of the chip.

REFERENCES:
patent: 3537319 (1970-11-01), Yerman
patent: 4173900 (1979-11-01), Tanabe et al.
patent: 4333349 (1982-06-01), Mallon et al.

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