Semiconductor pressure transducer

Details Semiconductor pressure transducer Semiconductor pressure transducer

1984-06-25

1985-07-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 338 4, 338 42, G01L 906

Patent

active

045302448

ABSTRACT:
A transducer for sensing pressure formed of a single crystal semiconductor chip having a cavity formed in one surface, wherein a tube to communicate pressure to the cavity surrounds the cavity, wherein pressure measuring sensors are disposed opposite the cavity and wherein additional pressure-responsive sensors are disposed on the chip to provide a signal for compensating for zero shift temperature and pressure induced signals generated by the measuring sensors.

REFERENCES:
patent: 3341794 (1967-09-01), Stedman
patent: 3697917 (1972-10-01), Orth
patent: 4333349 (1982-01-01), Mallon

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