Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1978-03-06
1979-11-13
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
73721, 73777, 338 4, 338 42, G01L 906
Patent
active
041739000
ABSTRACT:
A semiconductor pressure transducer comprising a disc-shaped pressure-responsive diaphragm; a pair of radial strain gauge units having a piezoresistance effect, formed by injecting an impurity in the radial direction in the surface of the diaphragm; and a pair of tangential strain gauge units having a piezoresistance effect, formed by injecting an impurity in the tangential direction in the surface of the diaphragm, wherein the distance from the pair of the radial strain gauge units to the center of the circular diaphragm is greater than the distance from the pair of the tangential strain gauge units to the center of the circular diaphragm.
REFERENCES:
patent: 3537319 (1970-11-01), Yerman
patent: 3820401 (1974-06-01), Lewis
Ai Mitsuo
Katohgi Katsuya
Matsuda Yasumasa
Matsuoka Yoshitaka
Nishihara Motohisa
Hitachi , Ltd.
Woodiel Donald O.
LandOfFree
Semiconductor pressure transducer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor pressure transducer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor pressure transducer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2267756