Semiconductor pressure transducer

Details Semiconductor pressure transducer Semiconductor pressure transducer

1985-07-11

1987-02-24

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With protective separator

73727, 73754, 73DIG4, 338 42, G01L 708, G01L 908

Patent

active

046447970

ABSTRACT:
A semiconductor strain-gage is disposed in a recessed chamber of a housing. A step is provided in the recessed chamber. Minute grooves are provided in the inner peripheral portion of the step. An outer periphery of a metal disk with a pressure introducing bore is clamped to the minute grooves by means of plastic deformation thereof, after the seal diaphragm is disposed on a planer portion of the step, whereby the seal diaphragm closes the recessed chamber harmetically.

REFERENCES:
patent: 3697919 (1972-10-01), Orth et al.

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