Semiconductor pressure sensor that suppresses non-linear tempera

Details Semiconductor pressure sensor that suppresses non-linear tempera Semiconductor pressure sensor that suppresses non-linear tempera

1997-02-06

1998-06-09

Oen, William L.

Measuring and testing

Fluid pressure gauge

Diaphragm

296211, G01L 906, H01C 1728

Patent

active

057619573

ABSTRACT:
A semiconductor pressure sensor includes a diaphragm of an octagonal shape formed on a (110) silicon substrate by anisotropic etching. When a distance between two sides of the diaphragm, which are defined by intersecting lines of a (110) face and a (111) face of the silicon substrate, is represented as L1 and a length of a side of the diaphragm, which is defined by an intersecting line of the (110) face and a (100) face, is represented as L2, the diaphragm is formed so as to satisfy the following relationship:

REFERENCES:
patent: 5289721 (1994-03-01), Tanizawa et al.

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