Semiconductor pressure sensor including a resistive element whic

Details Semiconductor pressure sensor including a resistive element whic Semiconductor pressure sensor including a resistive element whic

1997-09-11

2000-08-15

Oen, William

Measuring and testing

Fluid pressure gauge

Electrical

73708, G01L 900, G01L 916

Patent

active

06101883&

ABSTRACT:
A semiconductor pressure sensor includes a substrate with a semiconductor pressure detecting element mounted thereon. The pressure detecting element includes a pressure detector, having two terminals, which generates a small potential difference between the two terminals in proportion to a pressure applied to the pressure sensor, and a peripheral circuit for differential amplification of the small potential difference based on a reference voltage applied thereto. Reference voltage setting resistors are used to set the reference voltage to a predetermined value. Also, temperature compensating resistors compensate for an error produced in the pressure detector as a result of change in temperature and an error caused in the peripheral by a change of the reference voltage resulting from the change in temperature, respectively.

REFERENCES:
patent: 5335549 (1994-08-01), Kato
patent: 5343755 (1994-09-01), Huss
patent: 5544529 (1996-08-01), Mitani et al.
patent: 5684428 (1997-11-01), Nomura et al.

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