Semiconductor pressure sensor having double diaphragm structure

Details Semiconductor pressure sensor having double diaphragm structure Semiconductor pressure sensor having double diaphragm structure

1992-11-27

1994-08-09

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

With protective separator

73721, G01L 700

Patent

active

053355490

ABSTRACT:
In a semiconductor sensor having double diaphragm structure, in which pressure to be measured is applied to diaphragm portions having distortion gages via a liquid filled in spaces partitioned by sealed diaphragms, as circuit elements of a signal processing circuit for processing an output of a distortion gage bridge are integrated in and on a semiconductor chip having diaphragm portions, the number of component parts used is reduced, and a compact size, a low cost, and high reliability are attained. This arrangement can be applied to any of the pressure sensors for detecting absolute pressure, relative pressure, and differential pressure.

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European Search Report dated May 14, 1993.
K. J. Korane, "Silicon for High-Pressure Sensing", Machine Design, May 11, 1989, pp. 64-70.
P. W. Fry, "Series 2000: Taking the Cost Out of the Industrial Pressure Transducer", Sensors and Actuators, May 1991, Nos. 1-3, pp. 845-851.
L. Kirberich, "Innovative Druckmesstechnik mit Keramiktechnologie fur industrielle Druck-und Differenzdruck-messaufgaben", Messen Prufen Automatisieren, Apr. 1991, No. 4, pp. 160-164.

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