Semiconductor pressure sensor device with two semiconductor pres

Details Semiconductor pressure sensor device with two semiconductor pres Semiconductor pressure sensor device with two semiconductor pres

1991-03-06

1992-06-30

Prenty, Mark

357 70, 357 55, H01L 2984, H01L 2348, H01L 2906

Patent

active

051268132

ABSTRACT:
A semiconductor pressure sensor device that can improve the measuring accuracy without providing a silicon base in attaching a semiconductor pressure sensor chip to a lead frame, and a method of manufacturing thereof is disclosed. The semiconductor pressure sensor device includes a die-bond adhesive 10 formed of a resilient material for fixing a semiconductor pressure sensor chip 50 to a lead frame 100, a wire bond receiving projection 4 provided in the diepad where the semiconductor pressure sensor chip 50 is attached for receiving pressure application force from the bottom of the semiconductor pressure sensor chip 50 at the time of wire bonding, and a supporting projection 11 for preventing distortion stress by the wire bond receiving projection 4 from being transmitted. Thermal distortion of the semiconductor pressure sensor chip 50 and the lead frame 100 is absorbed by die-bond adhesive 10. By wire bond receiving projection 4 and supporting projection 11, stress acting on the semiconductor pressure sensor chip 50 is decreased to improve the measuring accuracy.

REFERENCES:
Electronics publication by Zias et al., entitled "Integration Brings a Generation of Low-Cost Transducers", 1972.

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