Semiconductor pressure sensor and pressure sensing device

Details Semiconductor pressure sensor and pressure sensing device Semiconductor pressure sensor and pressure sensing device

2005-05-17

2005-05-17

Hirshfeld, Andrew H. (Department: 2854)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S717000, C073S723000, C073S777000, C361S283100, C361S283400

Reexamination Certificate

active

06892582

ABSTRACT:
The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the pressure sensor produced according to the sacrificial layer etching technique, and to provide a pressure sensor characterized by excellent productivity and durability. After a very small gap is formed by the sacrificial layer etching technique, silicon oxide film is deposited by the CVD technique or the like, thereby sealing the etch channel. Further, impermeable thin film of polysilicon or the like is formed to cover the oxide film.This allows an etch channel sealing structure to be simplified in the pressure sensor produced according to the sacrificial layer etching technique, and prevents entry of moisture into the cavity, thereby improving moisture resistance. Moreover, sealing material with small film stress reduces temporal deformation of the diaphragm.

REFERENCES:
patent: 4665610 (1987-05-01), Barth
patent: 5544529 (1996-08-01), Mitani et al.
patent: 6388279 (2002-05-01), Sakai et al.
patent: 0947816 (1999-10-01), None
patent: 8501156 (1996-02-01), None
patent: 09257618 (1997-10-01), None
patent: 10111195 (1998-04-01), None
patent: 10300610 (1998-11-01), None
patent: 1114482 (1999-01-01), None
patent: 11014482 (1999-01-01), None
patent: 11031825 (1999-02-01), None
patent: 9417383 (1994-08-01), None
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