Measuring and testing – Fluid pressure gauge – Electrical
Reexamination Certificate
2011-04-19
2011-04-19
Allen, Andre J (Department: 2855)
Measuring and testing
Fluid pressure gauge
Electrical
C073S727000, C257S415000, C438S050000
Reexamination Certificate
active
07926354
ABSTRACT:
A diaphragm made of a polysilicon film is provided above a first main surface of a silicon substrate. Four gauge resistors are provided on the top face of the diaphragm. A through hole for exposing the bottom face of the diaphragm is formed in the silicon substrate. An anchor portion for mounting the diaphragm on the silicon substrate is provided between the diaphragm and the silicon substrate in a manner surrounding circumferentially an opening end of the through hole located at the side facing the first main surface. Accordingly, a semiconductor pressure sensor having a diaphragm of reduced and less varied thickness can be obtained.
REFERENCES:
patent: 5622901 (1997-04-01), Fukada
patent: 2005/0172724 (2005-08-01), Sakai et al.
patent: 2009/0140355 (2009-06-01), Izuo et al.
patent: 2009/0146230 (2009-06-01), Takizawa
patent: 2010/0083765 (2010-04-01), Yoneda et al.
patent: 2010/0083766 (2010-04-01), Yoneda et al.
patent: 2010/0218611 (2010-09-01), Sato
patent: 2010/0219490 (2010-09-01), Adachi et al.
patent: 2010/0270629 (2010-10-01), Tokuda et al.
patent: 3-6824 (1991-01-01), None
patent: 5-343705 (1993-12-01), None
patent: 10-22511 (1998-01-01), None
patent: 2000-249613 (2000-09-01), None
patent: 2001-304995 (2001-10-01), None
patent: 2003-332586 (2003-11-01), None
U.S. Appl. No. 12/846,072, filed Jul. 29, 2010, Sato et al.
U.S. Appl. No. 12/542,960, filed Aug. 18, 2009, Sato.
Allen Andre J
Mitsubishi Electric Corporation
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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